Photolithography Instruments

Osiris UNIXX S 20 D

Convection Ovens – Blue M DCC-146-C-ST350

Develop Hood

Mask Aligner – Suss MABA6

Mask Aligner – Suss MJB4

Maskless Aligner – Heidelberg MLA150

Maskless Aligner – Heidelberg uPG501

Microscope – Nikon LV150

Polyimide/SU8 Hood

Spinner Hood

Ultraviolet Flood Exposure System – Inpro Technologies F300S

Vacuum Oven

Photolithography Hood (Cook)

Mask Aligner – Q4000 (Cook)

Mask Aligner – MABA6 (Cook)