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NUANCE: Nanoscale Characterization Experimental Center

Atomic Layer Deposition – Arradiance GEMStar XT-P

The Arradiance ALD XT-P is full-featured ALD system capable of depositing highly conformal films over flat and patterned substrates and powders. Both metals and dielectrics can be deposited and multi-layer materials can be produced as well.

Instrument Details