Features
- Two systems: I and II
- Automatic Operation/PLC Control
- Programmable Digital Discrete Temperature Controller for Heated Zones
- Cold Trap Base
- Direct Drive Vacuum Pump – 6.9 CFM
- Heated Load Door
- Fixture Rotation
- Mechanical Chiller
SCS Labcoter2 Parylene Deposition System
Instrument Details
Parylene Coater
Facility Contact
Main Contact: Ying Jia, PhD
(847) 467-2142 / email
Location
Technological Institute FG70