Features
SEM Column
- Tungsten filament source.
- Resolution: <30 nm.
Imaging Detectors
- Standard lower SE detector for topographical information.
- 5 segment BSE detector for compositional contrast (3D reconstruction capability).
- Low-vacuum SE or BSE modes for enhanced charge suppression.
Analytical Detectors
- EDS: Oxford X-Act 10 mm2 SDD EDS detector and Aztec software for elemental characterization.
- WDS: Oxford Wave 500 WDS system.
