FEI Helios Nanolab SEM / FIB
Instrument Details
Features
- Five gas injection systems for etching / deposition
- ibss Group's GV10x Downstream Plasma Asher
- STEM detector
- Raith ELPHY ion beam lithography (IBL) capabilities
- Lift-out tools for TEM and Atom Probe Tomography (APT) samples
- Vibration isolation table
FEI Helios Nanolab SEM / FIB
NUcore RESERVATION
Facility Contact
Dr. Paul Smeets
TEM/FIB Facility Manager
Office: Tech, #AG92
847-491-7807 / paul.smeets@northwestern.eduLocation
Technological Institute AG97