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Special Topics in SEM and Microanalysis Workshop 

 July 12, 2022 9:30 AM (CT)


Program Schedule

The NUANCE Center’s EPIC-SEM facility is excited to welcome you to the SEM and Microanalysis Workshop with Hitachi High-Technology, and Oxford Instruments. This workshop is designed to educate internal and external users of the NUANCE Center’s Hitachi SEMs equipped with Oxford microanalysis tools, including energy dispersive x-ray spectroscopy (EDS), and wavelength dispersive spectroscopy (WDS). The workshop will include a fully remote morning of talks and demonstrations by experts from Oxford and Hitachi covering topics such as: 

  • Imaging capabilities on Hitachi c-FEG SEM’s 
  • An introduction to EDS using Oxford Aztec 
  • Scanning transmission electron microscopy imaging in the SEM (STEM) 
  • Aztec LayerProbe for compositional analysis of layered and 2D materials 
  • Sample preparation with the Hitachi ArBlade 5000 large area argon ion milling system (great for EBSD!) 

Morning Presentation Session - online via Zoom

9:30 – 9:35 AM 

Opening Remarks, Prof. Vinayak P. Dravid, NUANCE Founding Director

9:30 – 10:15 AM  

Hitachi SU8030 Imaging Capabilities with Q&A

10:15 – 11:00 AM

Introduction to Energy Dispersive x-ray Spectroscopy (EDS) with Aztec software overview, data collection, and Q&A

11:00 - 11:15 AM 


11:15 - 12:00 PM

SU8030 STEM Imaging and Deceleration

12:00 – 12:45 PM

 LayerProbe: Determining composition and thickness in 2-D materials using EDS 


Lunch Break (Technological Institute - AB Wing, 2nd floor atrium)

12:45 – 1:30 PM

Lunch will be generously provided by Oxford and Hitachi High Technology in the AB Wing 2nd Floor Atrium

Afternoon Sessions

1:30 – 3:00 PM

In-person Hitachi ArBlade IM5000 demo; Technological Insitute, Room AG76


Featured Speakers

Atsushi Muto

Atsushi Muto

Assistant Manager and Applications, Hitachi High-Tech America

Research Focus area: FE-SEM methodology development and application development in any research field from biology to semiconductor

Mr. Atsushi Muto is an Assistant manager and application in the Metrology and Analysis Division of Hitachi High-Tech America, Inc., and works from the Clarksburg, MD, office. In his current role, he supports the Americas by providing technical expertise, applications development, and collaborative research activities.  His research interests include FE-SEM system development, broad ion beam/focused ion beam applications and variable pressure electron microscopes. Mr. Atsushi Muto also had the opportunity to stay at NUANCE Center from 2007 to 2008 as an invited scientist sponsored by Hitachi. He learned application needs in the USA through active interactions with NUANCE facility members and users supervised by Dr. Vinayak Dravid.

Michael Hjelmstad

Michael Hjelmstad

Applications Specialist – NanoAnalysis Oxford Instruments Americas

Mike graduated from the University of Michigan in Materials Science & Engineering. He grew up a midwesterner and is always keen to visit customers in that part of the country. Mike has been the Applications Specialist for NanoAnalysis in Pleasanton, CA for the past 8 years. He provides the applications support and development as well as in-depth training of EDS, EBSD, and WDS systems. Current research interests include EBSD application development especially relating to semiconductor or additively manufactured materials.

Bob Passeri

"Hitachi" Bob Passeri

Midwest Sales Manager Hitachi High-Tech America, Inc.

"Hitachi" Bob received his BS in Physics from DePaul University and an MS in Materials Science from the University of Wisconsin-Madison.  Bob ran Hitachi SEM/EDS systems for several companies before joining the Company. Bob has been with Hitachi High Tech America, Inc. for 15 years in many capacities; first as a Field Service Engineer, then as an Applications Specialist and now as the Midwest Sales Manager, covering North Dakota to Texas to Michigan. He's the first to have that trifecta in job titles with Hitachi-HTA and is always excited to bring all vast experience both to his current and potential customers using Hitachi equipment in all kinds of various applications.