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VELION - A Novel FIB-SEM Nanofabrication Instrument Concept and its Applications in Nanoscale Science and Engineering

Torsten Richter, Product Manager, Raith GmbH  
Yang Yu, Applications Scientist, Raith America

Monday October 14, 2019
2:00-3:30 pm
Silverman 2-510

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Raith is a leading provider of precision nanofabrication instruments for more than 40 years. Its’ product portfolio includes FIB nanofabrication instruments, high performance Gaussian Beam electron beam lithography (EBL) systems, SEM-based EBL solutions, and nanolithography add-on kits for microscopes (SEMs and FIBs.)

Raith has advanced FIB instrumentation over the last fifteen years with the vision that nanofabrication has special requirements that should drive the development of FIB technology. Here, we present a new FIB-SEM nanofabrication instrument containing these essential components of EBL instrumentation, and review its FIBL applications in plasmonics and nanophotonics, including plasmonic arrays and zero mode waveguides for sensing biological molecules, solar absorber arrays, color center creation by maskless ion implantation, large area photonic structures in diamond, and metallic metasurfaces. Beyond nanofabrication, VELION is also capable of generating lamellas for transmission electron microscopy (TEM) analyses. The workflows will also be presented.