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Facility

Keck-II

High Resolution Stylus Profilometer


Profilometer

  • 3D topographical surface map rather than just traditional line scan

  • Larger sample (up to 150 mm wafer) and longer scan (up to 55 mm)

  • Vertical resolution - 1 ångström

  • Vertical Range - 524 um

  • Powerful and user-friendly software

  • Stylus radius- 12.5 um, 5.0 um, 2.5 um

  • Profilometer User Manual

 

profilometer_L1

profilometer_L2