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Facility

Keck-II

NEXSA G2 XPS

 

 NEXA G2 XPS instrument

Features:

· Analyzer type: 180-degree double-focusing, hemispherical analyzer with 128-channel detector

· X-ray source type: Monochromated, micro-focused, low-power Al K-Alpha X-ray source

· X-ray spot size: 10 to 400 um (adjustable in 5 um step)

· Depth profiling: EX06 monatomic Ar ion source and cluster Ar ion source

· Maximum sample area: 60 mm x 60 mm

· Maximum sample thickness: 20 mm

· Sample transfer: Fully automatic transfer

· Air free transfer: equipped

· Sample rotation: equipped