Detailed information about surface morphology, size/shape analysis, local chemistry, crystallography/texture can be obtained with our scanning electron microscopes.

Currently, EPIC's SEM facility consists of three different SEMs. Also, an extensive sample preparation facility exists that aids EPIC's users in optimal sample imaging.

• Schottky field emission gun for high resolution and excellent beam stability
• Allows for true SE imaging of wet, insulating samples up to 4000Pa chamber pressure
• Standard E-T SE detector, solid-state BSE detector, 2 gaseous SE detectors and a gaseous BSE detector
• Resolution of <2nm @ 30kV in high vacuum, <2nm @ 30kV in ESEM and <3.5nm @ 3kV in Low Vacuum mode
• Automatic, programmable stage with 6” wafer capacity
• Integrated Oxford EDS system
• NPGS pattern generation system for high resolution electron beam lithography (eBL)
• High-speed beam blanking capabilities for lithography
• Integrated beam current measurement system
• Peltier variable temperature stage for humidity cycling experiments

 FEI Quanta ESEM Manual

• Schottky field emission gun for high resolution and excellent beam stability
• Large specimen chamber capable of imaging up to a 6" wafer
• Spatial resolution of 1.5nm at 20kV and 3.5nm at 1kV
• High probe current with stability better than 0.5% per hour. Variable from 4pA to 10nA
• In-lens and lower SE detectors. Robinson backscattered electron detector for compositional contrast
• ElectronScribe beam writing interface for electron beam lithography
• Keithley 480 picoammeter and faraday cup for beam current monitoring

 Leo Gemini 1525 Manual

• 1.4nm resolution at 1kV with beam deceleration
• 1.0nm resolution at 15kV
• Super ExB filter allows low kV, high res, BSE imaging and energy filtering
• Large 5axis computer eucentric stage (110mm x 110mm)
• STEM detector for bright and dark field STEM imaging TMP pumped
• Infrared chamberscope and 6 specimen exchange airlock

 Hitachi S-4800 Manual

• Variable Pressure SEM with tungsten filament
• Large specimen chamber (up to 8 diameter specimens, 85mm in height)
• 5axes motorized, computer eucentric stage
• 5 segment BSE detector (3D reconstruction capability)  ESED II detector (for low vacuum SE imaging)
• Infrared chamber scope
• TMP pumped
• New software with signal mixing, image management

Hitachi S-3400N-II Manual