The Electron Probe Instrumentation Center (EPIC) houses the following instruments for scanning electron microscopy (SEM), transmission electron microscopy (TEM), and scanning transmission electron microscopy (STEM).

• HF-2000 TEM: A fully equipped atomic resolution analytical electron microscope with a high-brightness cold cathode field emission gun operated at 200kV. With its many analytical instruments, including STEM, GIF, and EDS, this unit forms the centerpiece of the TEM section of EPIC.
• Hitachi H-8100 TEM: This 200kV TEM with STEM capabilities, BF/ADF/micro diffraction detectors, and PC based acquisition system is EPIC's workhorse conventional TEM.
• JEOL JEM-2100F FAST TEM: Analytical Scanning Transmission Atomic Resolution (A STAR) electron microscope, with a high-brightness Schottky FEG emitter operated at 200kV. It has many analytical attached instruments, including STEM, GIF, and EDS and will become the centerpiece of the TEM section of EPIC in near future.

• Hitachi S4800-II : This ultra-high resolution cFEG SEM (<1nm) scanning electron microscope offers upper and lower SE detectors; the upper detector has low kV BSE imaging mode with ExB filter. Beam deceleration mode allows for ultra-low voltage imaging (down to 100V), and the STEM detector is included for bright/dark field imaging
• Hitachi S3400N-II: This variable pressure SEM with a tungsten filament is capable of imaging and analysis of pristine materials. This unit is equipped with an ESED II detector (for low vacuum SE imaging).
• LEO Gemini 1525 SEM: a Schottky thermal field emission SEM equipped with Electron Beam Lithography.
• FEI Quanta ESEM: a Schottky thermal field emission environmental SEM equipped with Oxford EDS and NPGS lithography systems.

• FEI Helios NanoLab Dual Beam SEM/FIB : Simultaneous FIB milling and SEM imaging, with a STEM detector, Bruker Quantax SDD EDS detector, and Omniprobe AutoProbe allow for subnanometer SEM resolution at 15kV, <1.5nm at 1kV. The high current Sidewinder FIB column with 5nm resolution at 30kV and low energy milling capabilities is a useful feature.