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Facility

EPIC

SEM

Detailed information about surface morphology, size/shape analysis, local chemistry, crystallography/texture can be obtained with our scanning electron microscopes.

The EPIC Lab houses an impressive array of 5 Scanning Electron Microscopes (SEM's), each with its own specialized set of capabilities. From 1nm resolution imaging, to x-ray microanalysis (EDS), to imaging of pristine materials, to electron beam lithography, the EPIC Lab can help with your sample. An extensive sample preparation facility exists that aids EPIC's users in optimal sample imaging.

In addition to our state-of-the-art equipment, experienced staff members are on-hand to train and assist users with the microscopes and the sample preparation techniques.

SEM Introductory Video available in the NUANCE "Education and Outreach" section.



FEI Quanta 650 ESEM

  • Schottky field emission gun for high resolution and excellent beam stabilitysem s4800

  • Allows for true SE imaging of wet, insulating samples up to 4000Pa chamber pressure

  • Standard E-T SE detector, solid-state BSE detector, 2 gaseous SE detectors and a gaseous BSE detector

  • Resolution of <2nm @ 30kV in high vacuum, <2nm @ 30kV in ESEM and <3.5nm @ 3kV in Low Vacuum mode

  • Automatic, programmable stage with 6” wafer capacity

  • Integrated Oxford AZtec EDS and EBSD system

  • NPGS pattern generation system for high resolution electron beam lithography (eBL)

  • High-speed beam blanking capabilities for lithography

  • Integrated beam current measurement system

  • Peltier variable temperature stage for humidity cycling experiments

  • FEI Quanta 650 ESEM Manual


 
LEO Gemini 1525

  • Schottky field emission gun for high resolution and excellent beam stability

  • sem leoLarge specimen chamber capable of imaging up to a 6" wafer

  • Spatial resolution of 1.5nm at 20kV and 3.5nm at 1kV

  • High probe current with stability better than 0.5% per hour. Variable from 4pA to 10nA

  • In-lens and lower SE detectors. Robinson backscattered electron detector for compositional contrast

  • Leo Gemini 1525 Manual


  
Hitachi S4800-II cFEG SEM

  • Cold source Field Emission SEM

  • 1.4nm resolution at 1kV with beam deceleration.

  • 1.0nm resolution at 15kV.sem-s4800

  • Double condenser optics.

  • High resolution Through The Lens (TTL) SE detector (upper).

  • In chamber topographical SE detector (lower).

  • Large 5axis computer eucentric stage (110mm x 110mm).

  • Oxford INCA SiLi EDS System.

  • 1.5kV beam deceleration mode for low-voltage imaging.

  • Leica cryo stage with VCT100 transfer system and suite of cryogenic preparation equipment.


  
Hitachi S-3400N-II

  • Variable-pressure tungsten filament SEM capable of imaging and analysis of pristine materials.

  • 5 segment solid state BSE detector for low vacuum imaging, with 3D reconstruction capability.

  • ESED II detector for low vacuum imaging.Hitachi 3400n

  • Oxford INCAx-act SDD EDS for elemental analysis.

  • Oxford WAVE WDS system for elemental analysis.

  • Large specimen chamber (up to 8” diameter specimens, 85mm in height).

  • 5axes motorized, computer eucentric stage.

  
Hitachi SU8030

  • Cold source Field Emission SEM.su8030

  • Spatial resolution of 1.0 nm at 15kV and 1.3 nm at 1kV; Highest resolution SEM in the lab.

  • Double condenser optics.

  • A large specimen chamber.

  • High resolution Through The Lens (TTL) SE detector (upper).

  • In chamber topographical SE detector (lower).

  • Super ExB filter allows low kV, high res, BSE imaging and energy filtering.

  • Oxford AZtec X-max 80 SDD EDS detector.

  • Large 5axis computer eucentric stage (110mm x 110mm).

  • Vibration isolation table.

  • 2.5kV beam deceleration mode for low-voltage imaging.

  • Dark Field STEM detector.


Reasons to use:
  • Ultra-high resolution. Highest resolution SEM in the lab.

  • Newest EDS detector in the lab able to get the highest number of counts and best energy resolution.

  • New Oxford AZtec EDS software with improves algorithms for calculating quantitative results.

  • Vibration isolation table. The FIB is the only other instrument in the lab so equipped right now.

  • 2.5kV deceleration mode for low voltage imaging.

  • SE(L) mode for enhanced imaging using only the lower SE detector. Gives great topographical information and reduced charging effects over the upper SE detector.



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