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FEI Helios Nanolab SEM/FIB

The FIB facility in EPIC houses at FEI Helios Nanolab 600 dual-beam FIB / SEM. FIB tomography, electron and ion beam lithography, nanomanipulation, probing, in situ probing, EDS, and a range of imaging modalities. In addition, the system is equipped with gas injection systems for deposition (Pt, C, SiOx) and etching (TFA, I, H 2 O).

FEI Helios Nanolab SEM / FIB

This dual-beam FIB / SEM enables simultaneous FIB milling and SEM imaging and is equipped with a STEM detector, Bruker Quantax SDD EDS detector, Omniprobe AutoProbe and Kleindiek nanomanipulation system. Capable of subnanometer SEM resolution at 15kV, <1.5nm at 1kV. The high current Fib column provides 5nm resolution at 30kV and low energy milling capabilities.

  • Five gas injection systems for etching / deposition
  • ibss Group's GV10x Downstream Plasma Asher
  • STEM detector
  • Bruker EDS
  • Raith ELPHY ion beam lithography (IBL) capabilities
  • Lift out tools for TEM and Atom Probe samples
  • Vibration isolation table
  • FEI Helios Nanolab SEM / FIB Manual

Helios NanoLab