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Facility

EPIC

FEI Helios Nanolab SEM/FIB

The FIB facility in EPIC houses a FEI Helios Nanolab 600 dual-beam FIB/SEM. This instrument is fully equipped for a range of sample preparation, microanalysis and nanofabrication applications including TEM and atom probe sample preparation, automated slice-and-view FIB tomography, electron and ion beam lithography, nanomanipulation, in situ probing, EDS, and a range of imaging modalities. In addition, the system is equipped with 5 gas injection systems for deposition (Pt, C, SiOx) and etching (TFA, I, H2O).


FEI Helios Nanolab SEM/FIB

This dual-beam FIB/SEM allows simultaneous FIB milling and SEM imaging and is equipped with a STEM detector, Bruker Quantax SDD EDS detector, Omniprobe AutoProbe and Kleindiek nanomanipulation system. Capable of subnanometer SEM resolution at 15kV, <1.5nm at 1kV. The high current Sidewinder FIB column provides 5nm resolution at 30kV and low energy milling capabilities.

  • Five gas injection systems for etching/deposition

  • STEM detector

  • Bruker EDS

  • Raith ELPHY ion beam lithography (IBL) capabilities
  • Lift out tools for TEM and Atom Probe samples

  • Vibration isolation table

  • FEI Helios Nanolab SEM/FIB Manual
  FIB SEM


Helios NanoLab