Instruments
TEM
SEM
FIB
SPF
FEI Helios Nanolab SEM/FIB
Dual-beam SEM/FIB equipped with a Schottky field emission gun
Five gas injection systems for etching/deposition
STEM detector
Bruker EDS
Lithography capabilities
Lift out tools for TEM and Atom Probe samples
© 2009 NU
ANCE
. All rights reserved.
Northwestern University, 2220 Campus Drive #2036, Evanston, IL 60208-3108
Phone: 847-467-2318, Fax: 847-467-6573
Email questions to:
nuance@northwestern.edu
.