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  Instruments              
   
    TEM   SEM   FIB   SPF
  FEI Helios Nanolab SEM/FIB
 
  • Dual-beam SEM/FIB equipped with a Schottky field emission gun
  • Five gas injection systems for etching/deposition
  • STEM detector
  • Bruker EDS
  • Lithography capabilities
  • Lift out tools for TEM and Atom Probe samples

Helios NanoLab

Graduate Students shown at FEI FIB Research Assistant Professor Dieter Isheim shown at FEI FIB