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   DI SPM  NSOM  FEMTO LASER

Electric Force Microscopy (EFM): Measures electric field gradient distribution above the sample surface; performed using LiftMode to track topography (Extender Electronics Module recommended). The Extender module improves results by instead measuring changes in phase or resonant frequency of the oscillation, providing an improved noise floor and allowing even more sensitive measurements than before. In addition, the phase and frequency signals are generally immune to interference and artifacts. Specifically, measurements of phase or frequency can reduce or eliminate commonly observed optical interference artifacts and can also reduce topographic contamination of electric or magnetic field data that result from air damping of the cantilever amplitude. An additional benefit is that the measurements are more quantitative and repeatable from probe to probe.

Surface Potential Detection. The Extender module can also be used to measure actual surface potential, or voltage. Here, a solid state relay in the Extender module switches the oscillator signal to the probe itself. The cantilever supporting the probe is driven into oscillation electro statically and the oscillation amplitude depends on the DC potential difference between tip and sample. The lock-in amplifier produces an output of zero when the potential on the tip matches the potential on the sample. The servo controller sets the lock-in output to zero by varying an additional potential applied to the tip. At this point, the potential on the tip and sample are the same and the NanoScope IIIA controller records the tip potential to create an image of the sample surface potential. Surface potential detection has applications in semiconductor failure analysis, composite materials, superconductor characterization and others. This example (right) shows the surface potential on biased metal lines on a GaAs device.

User Manual for Electrostatic Force Microscopy