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Identification of the elements and
chemical status with the electronic database.
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Quantification of chemical composition.
Destructive depth profiling using an ion gun.
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Non-destructive depth profiling
by the angle-resolved analysis.
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Neutralization of surface charging
with the electron flood gun.
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Automatic peak fitting and target
factor analysis, depth profile calculation, as well
as curve smoothing, background removing with the
loaded Multipak software.
