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What does ToF-SIMS do?
Instruments ListWhat does ToF-SIMS do?
The ToF-SIMS (PHI TRIFT III, Physical Electronics) has attractive capabilities:
  1. Identifying the elemental composition and the chemical status near the surface (around 5 angstrom) with high sensitivity (~1ppm) and high mass resolution (~9000).
  2. Distinguishing the different isotopes of the same element.
  3. Imaging the topography of surface using the secondary electrons.
  4. Line-scanning of chemical species.
  5. Mapping chemical species on the submicron scale.
  6. Ultra-thin depth profiling.
  7. Database of the compound spectra.
  8. Identifying automatically peaks with the database of fragments.
The TRIFT III ToF-SIMS is fully controlled by a computer so that one feels very comfortable during operation. The ToF-SIMS can be used for surface analysis of inorganic, organic materials and biological cells, applied to conductors, insulates and semiconductors.

High-sensitivity SIMS spectra, 40ppm Si in the GaN film, by Joel Gregie
High resolution SIMS spectrum
 
Related subtopics:
What is ToF-SIMS?
How to prepare SIMS samples?
How to operate ToF-SIMS?

 
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