High Resolution Stylus Profilometer
3D topographical surface map rather than just traditional line scan
Larger sample (up to 150 mm wafer) and longer scan (up to 55 mm)
Vertical resolution - 1 ångström
Vertical Range - 524 um
Powerful and user-friendly software
Stylus radius- 12.5 um, 5.0 um, 2.5 um
© 2009 NU
ANCE
. All rights reserved.
Northwestern University, 2220 Campus Drive #2036, Evanston, IL 60208-3108
Phone: 847-467-2318, Fax: 847-467-6573
Email questions to:
nuance@northwestern.edu
.
