| SEM:
Included in EPIC is the SEM facility,
containing a LEO Gemini 1525 sFEG
SEM, Hitachi S-3400N-II variable-pressure
SEM, FEI Quanta sFEG environmental
SEM and a Hitachi
S-4800-II cFEG SEM.
TEM:
EPIC also houses the TEM facility,
which contains a JEOL JEM-2100F FEG
FasTEM, a Hitachi H-8100 TEM
and a Hitachi HF-2000 analytical electron
microscope, and a specimen preparation
facility(SPF). With these microscopes
comes an array of analytical techniques,
including high spatial resolution
electron energy loss spectroscopy
(EELS) and energy dispersive spectroscopy
(EDS), atomic-resolution imaging,
electron holography, convergent beam
electron diffraction (CBED), and digital
spectrum acquisition in TEM, electron
backscatter diffraction pattern (EBSP)
analysis and orientational imaging
microscopy and e-beam lithography
in SEM.
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